< Back
Informasi Alat
| Nama Alat | MICRO SPOT SPECTROSCOPY ELLIPSOMETRY AND IMAGING UVISEL PLUS |
|---|---|
| Deskripsi Alat | Analisis dan karakterisasi sampel thin film, utamanya untuk mendapatkan nilai ketebalan dan konstanta optik (contoh: Indeks Bias) 1300039219: "UVISEL Plus: Spectroscopic Phase Modulated Ellipsometer - Standard Spectral range: 190-885 nm - Double Scanning Monochromator System for UV-Vis Range - 190nm – 885nm (stray light rejection < 0.5% at 190nm). - PMT detector for highest sensitivity and dynamic range. - Fixed spot size: 2 mm@90° - External power supply - USB connection for interface to computer", 1 Unit 1300013202: "NIR extension to 2100 nm: - High resolution Scanning NIR Monochromator - 830nm – 2100nm. - InGaAs detector", 1 Unit 1123301080, 1123301160: 150W Xenon light source (with lifetime of 1000 hours), 1 Unit 1123301080, 1123301160: 150W Xenon light source (for spare, with lifetime of 1000 hours), 1 Unit 1123301151: "Achromatic Microspot Optics: - Spot sizes: 0,05-0.1-1.0 mm - Mirror based optical coupling to the sample. Imaging a manually selectable pin-hole, allows having different spot size on the sample. - Imagery camera strongly recommended", 1 Unit 1300012819: "Computer controlled variable angle goniometer: - Angle range 45° - 90° by step of 0.01° - Angle accuracy: ± 0.01 ° - Allows Variable Angle Spectroscopic Ellipsometry", 1 Unit 1300056791: "Computer controlled 200mm x 200mm XY Stage: - Horizontal position of the sample (allows liquid measurements) for automated sample mapping - Stroke: 200mm x 200mm - 200mm circular sample holder - Manual Z-height adjustment: 4 mm - Manual Mechanical tilt for alignment - Autocollimation system for sample alignment", 1 Unit 1123430290: "Theta Stage: - 150 mm diameter - Manual sample height: 20 mm - Tilt adjustment - Resolution: 0.005° - Positioning repeatability: ±0.01° - Marked in 1° graduation", 1 Unit 1300004162: Transmission Cell for UVISEL (transmission measured @90°), 1 Unit 1300012731: Imagery camera for UVISEL Plus (including wafer illumination cable, video monitor), 1 Unit 1300055597: Cabinet for UVISEL Plus (New version), 1 Unit 1300083938: Computer WIN 10 (or higher version) evaluated in HORIBA France, 1 Unit HFR: Additional Dongle (DeltaPsi Software) for post-processing, 4 Units HID_SCI_LC: "-UPS 3KVA (UPS APC SM 3000VA LCD 230V – SMC3000I or equivalent) - Curved monitor (LED DELL U342WE 34” Curved IPS WQHD USB-C DP HDMI or equivalent) - Printer (Epson EcoTank L121 A4 or equivalent) - Software - Wireless adaptor (TP-LINK or equivalent) - Dry cabinet (ANDBON Dry cabinet AD-50S capacity 50 liters or equivalent) - Dehumidifier (Stadler Form Alert Little or equivalent) - Temperature and humidity monitor (Aventru HTC-2 or equivalent) - Instrument and computer table - One set of tweezers, one box of gloves, - Black curtain", 1 Unit HID_SCI_LC: "-2 years comprehensive warranty - Training for unlimited participants (onsite) after installation for 1 week - Training certificate - Free refresh training (Offline and or Online) once a year if needed - Free (unlimited time) technical and application support from HORIBA Indonesia (Online and Offline if needed) - Maintenance once a year if needed by HORIBA Indonesia" HID_SCI_LC: Shipment Cost from HORIBA France to HORIBA Indonesia, 1 Unit HID_SCI_LC: Installation and Commissioning, 1 Unit |
| Preparasi Sample | |
| Lokasi | Lab Terpadu Jatinangor FMIPA |
| PIC | Yudi Darma |
| Status | Active : Penggunaan Alat dapat dilakukan oleh semua users. |
| Waktu Penggunaan Alat | Per-jam |
